Lumineq plant now world's largest ALD-enabled product factory

With Beneq’s acquisition of the thin film electroluminescent (TFEL) business from US Planar Systems, Inc., the factory located in Olarinluoma, Finland, has become the largest in the world for atomic layer deposition (ALD) enabled products.

This factory is now home to Lumineq, a new business unit that is strongly complemented by Beneq’s world-leading ALD technology and related thin film coating equipment.Additionally, the factory is the longest established of its kind, with an impressive 30-year history in this niche field, and originally belonging to a Finnish pioneering company in electronics.


“Our Lumineq factory offers customers 24/7 capability, industrial-scale capacity and specialized in-house know-how to tackle any thin film challenge that can be solved with ALD technology,” says Sampo Ahonen, CEO of Beneq. “The people and products of Lumineq have built a solid reputation for rugged reliability with their customers. This is what has made them #1 in this field.”


Lumineq employs 80 specialists with careers averaging over 10 years in this specific TFEL area. The 10,000 m2 facilities with its quality certified systems include all the knowledge of ALD technology under one roof: substrates, chemicals, coatings, finishing and assemblies. Additionally, a state-of-the-art clean room (2,000 m2) provides an ideal environment for scientific research.


In addition to the world-leading ALD coating services, the Lumineq factory offers other highly specialized services: metal sputtering, optical bonding, indium doped tin oxide (ITO), laser cutting, metal patterning and acidic etching, chemical Ni growth and substrate cleaning.


Customers are invited to outsource ALD-related and other thin film work to Lumineq or use the comprehensive facilities as a protoshop or as an extension of their own R&D department.

Beneq offers comprehensive thin film coating services,

from R&D and pilot-scale feasibility runs to full-fledged

industrial-scale coating operations.


For more information, please contact:

Mr Sampo Ahonen, CEO, Beneq

Tel: +358 40 520 1090

e-mail: sampo.ahonen(at)

Lumineq, a business unit of Beneq, is the world’s premier manufacturer and developer of thin film electroluminescent (TFEL) displays. Lumineq displays are in use in a wide array of applications in mining, marine and off-shore, public safety, medical device, military/avionics and generic industries. The display itself is robust and reliable, and it is habitually used in extreme environments, often being the only type of display that can cope with the conditions. Lumineq also manufactures and develops transparent electroluminescent thin film displays (TASEL) for applications that combine aesthetics with superior reliability and unique viewing experience.


Beneq, based in Finland, is a leading supplier of production and research equipment for thin film coatings, as well as the world’s premier manufacturer and developer of thin film electroluminescent (TFEL) displays. Beneq thin film equipment is used for thin film coatings in solar photovoltaics, flexible electronics, strengthened glass and other emerging thin film applications. Industry-proven Beneq equipment and thin film experience is used for improving the efficiency of crystalline silicon and thin film solar cells, producing transparent conductive oxide (TCO) coated glass and making touch screen glass more durable. Beneq has introduced several revolutionary innovations within its coating technologies, including roll-to-roll atomic layer deposition (ALD) and high-yield atmospheric aerosol coating (nAERO®). In addition to process equipment, Beneq also offers complete coating services.

600450 Lumineq plant now world's largest ALD-enabled product factory
Date: 7 February 2013

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