Although Bühler Leybold Optics is active in developing all different fields of coating technologies, for example PECVD or evaporation methods, magnetron sputtering is still the technology of choice in large area coating.
The company offers all relevant sputtering methods, including DC, DC pulsed (uni- and bipolar), MF and HF with rotatable and planar cathodes for the deposition of metallic, semiconducting and insulating films at high sputter rates.
Depending on the machine platform, Bühler cathodes are available as horizontal drop-in and side-mounted or vertical hinged versions
Bühler has built up extensive expertise in handling exotic target materials. Providing a safe design to work with potentially toxic or flammable materials is crucial for establishing a safe, reliable and responsible working environment.
Bühler is always dedicated to creating the best solution for the requested process. Please challenge us.
With its unique compartment design, LEYBOLD OPTICS GLC series H is ideally suited for challenging layer stacks and flexible product mixes. Typical coatings include solar control, anti-reflection, single, double and triple low emissivity (low-e) as well as solar control coatings. The LEYBOLD OPTICS GLC series H is available for standard US and Jumbo substrate sizes and can be configured to coat on glasses of sizes up to 3,3 m * 15,6 m. Advanced technology ensures low production costs
Unique gas flow for high process quality
Intelligent solutions for an optimized design
Dozens of installed systems have accomplished benchmark levels in uptime, throughput and layer quality. The LEYBOLD OPTICS GLC series V serves the needs of anti-reflection and high-reflection coatings as well as transparent conductive oxide coatings such as ITO or AZO. High flexibility thanks to a modular concept and a variety of sizes
Tilted versions for low particle applications
The LEYBOLD OPTICS GLC series V is available in tilted versions of +7° or -7°, minimizing particle impact on the substrate surface.
Low production costs thanks to single-purpose optimization
LEYBOLD OPTICS GLC 2000V is the sputtering tool for high precision demands. It offers the combination of large substrate sizes and wide temperature ranges with a standard coating uniformity of +/- 1.5%. Typical coatings include low emissivity (low-e), solar control, AR, anti-reflection, high-reflection and transparent conductive oxide coatings, as well as exotic target materials. Versatile application possibilities due to a wide temperature range
Intelligent design and software for highest flexibility and reliability
Excellent heating uniformity thanks to optimized heating zones
Heating uniformity is absolutely essential for the production of high-performance transparent conductive oxide (TCO) layers. Even at substrate temperatures of up to 350 °C LEYBOLD OPTICS GLC 2000V offers excellent temperature distribution properties thanks to multiple customizable heating zones.
Excellent serviceability thanks to cathode lid design
The unique cathode design allows for excellent accessibility and easy maintenance, ensuring that downtime for the LEYBOLD OPTICS GLC 2000V is kept to a minimum.