LG.Philips LCD, Seoul, is a leading manufacturer of TFT-LCD (thin film transistor-liquid crystal display) panels. The order includes iHxK and diFxK vacuum systems specifically designed by BOC Edwards to support LCD process applications.
Our investment in product development for the LCD market, combined with an emphasis on site support, has played a major part in securing this important business, said Brian Emslie, business development director-process enabling technologies, BOC Edwards We are extremely pleased to have been selected, and are looking forward to working closely with LG.Philips LCD to meet full production at P7.
BOC Edwards iHxK systems are designed and proven to withstand the harsh process environments encountered when pumping corrosive and toxic gases, whereas diFxK systems are used for pumping large chambers repeatedly from atmosphere to vacuum.
Both the iHxK and diFxK systems employ an integrated modular approach where the optimum number of vacuum modules required are employed, leading to cost-effective solutions with lower running costs, reduced footprint and weight, improved serviceability and single point of contact hook up. The diFxK vacuum pumps are built at Songwon Edwards Ltd (SEL), a BOC Edwards operating entity, in Chunan, Korea.