Applied Films Corporation Introduces New TFT Array PVD Equipment Platform for the Flat Panel Display Industry

TRITON will be introduced at the International Flat Panel Display Exposition 2004 being held in Taiwan from June 9 to 12, 2004.

Thomas Edman, President and Chief Executive Officer of Applied Films Corporation, said: "The introduction of the TRITON system broadens our product offering to include the TFT array side of LCD manufacturing as well as the color filter side that we currently provide. This more than doubles our available market opportunity for LCD flat panel display equipment. We believe we can penetrate the TFT side of the market because the unique and innovative features of our new TRITON system will deliver a superior alternative to the existing technology."

TRITON is designed for the high-quality requirements of TFT array for LCD mass production and incorporates various patented and patent-pending technologies. Our system is based on Applied Films' proven PVD technology for substrate sizes Gen. 6 and larger. A major innovation is a proprietary air cushion handling system for vertical carrier-free transport of substrates that minimizes the risk of particle contamination during the entire production process and allows the substrates to move carrier-free through both atmosphere and vacuum processes. The TRITON system provides tact times of 60 seconds or less for the production of 3 layer TFT stacks and potential target utilization of more than 75% using proprietary cathode technology.

The TRITON system combines the proven elements of in-line and cluster deposition processes, and allows for flexible interface options, such as swing stations which convert substrates from horizontal to vertical, allowing easy integration into existing TFT production environments. Applied Films' precision controlled large area static sputtering with an array of either planar or rotatable cathodes offers several benefits to TFT-LCD producers, including high target utilization, low particle level by minimized re-deposition areas, easy target exchange and excellent uniformity.

Joachim Nell, Executive Vice President of Worldwide Sales and Marketing, said: "Our engineering team in Germany did an excellent job of re-defining the equipment landscape for TFT array systems which we believe shifts the "state of the art" to Applied Films."