Semiconductor Industry Recognizes Need for Entegris’ Liquid Flow Control Technology

Entegris, Inc., materials integrity management, announced today that its subsidiary NT International secured orders for its NT® 6500 Integrated Flow Controller (IFC) to three of the world’s top five microelectronics equipment makers and to three of the world’s top device manufacturers.

These repeat orders, totaling more than $500,000, demonstrate the strength of the IFC product acceptance in the semiconductor market. NT International, a wholly owned subsidiary of Entegris specializing in sensing and control instruments for high purity and corrosive chemicals, will continue delivering on the orders during the company’s second fiscal quarter in 2004.

NT International is the leading provider of flow control technology to the microelectronics industry. The company’s flow controllers supply a direct flow measurement and closed loop control, enabling automation in batch filling, batch control, blending, chemical spiking and liquid dispense for critical fluids used in semiconductor processes. The IFC is designed to improve process consistency, reduce maintenance and increase manufacturing uptime and yields.

“Improving yields, optimizing chemical usage and maintaining material integrity are some of the greatest challenges in the semiconductor industry,” said Patrick McKinney, president of the Entegris semiconductor market segment. “These are key areas where, through NT International, we can provide measurable value with products like the IFC. We are the leading provider of flow control technology which enables the end user to accurately measure and control critical fluids – essential for attaining high process yields in wet etch, critical cleaning, CMP process and on-demand chemical blending applications. The growing install base for this product is a clear indication of our leadership in flow control technology.”

600450 Semiconductor Industry Recognizes Need for Entegris’ Liquid Flow Control Technology

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