Sematech, Asahi Glass to improve EUV mask blank yield

Sematech and Asahi Glass Co. (AGC) have entered into a joint development partnership to accelerate mask blank commercialization.

Sematech and AGC will collaborate at the College of Nanoscale Science and Engineering (CNSE) of the University at Albany on methods for improving extreme UV (EUV) mask blank yield to accelerate commercial manufacturing readiness. In this latest move toward enabling critical infrastructure for EUV lithography, a team of engineers from AGC has been assigned to Sematech’s EUV Mask Blank Development Center at CNSE’s Albany NanoTech with the goal of reducing defect levels to the 0.003 defects/cm² at the printable defect size, which is required for manufacturing success.

Mask blanks are the starting material used to make the finished mask that contains the device pattern for the lithographic process. Producing defect-free mask blanks in the quantities required for high-volume manufacturing is a key technical challenge that must be solved to prepare EUV lithography for cost-effective insertion at the 22nm half-pitch generation and below.

Read more.

600450 Sematech, Asahi Glass to improve EUV mask blank yield
Date: 4 March 2009

See more news about:

Others also read

For further upscaling, the plant has provision for a second float line which can support an additional 850 tonnes per day.  With an aim to further strengthen its leadership position in the glass industry, the Rs15bn.
We sincerely thank all our members, friends and visitors for being part of GlassOnWeb and its success during 2009.
During the annual Dujat December Dinner on Thursday 10 December 2009, Minister for Economic Affairs, Ms.
A prestigious international prize states the poetic beauty and the architectural value of “Tiberio's Baths” in Panticosa (Spain), the new health and wellbeing centre in the heart of the Spanish Pyrenees made entirely using special glass blocks with a trapezoidal section.
Chicago — December 17, 2009 — Designers and engineers examined the product pages on nearly one million times in 2009 in hopes of finding the right materials or technologies for their projects.
A team of researchers from the University of Vigo, Rutgers University in the United States and Imperial College London, in the United Kingdom, has developed "laser spinning", a novel method of producing glass nanofibres with materials.

Add new comment