Carl Zeiss System PROVE™ passed Final Acceptance at NuFlare Technology

Date: 16 March 2011
Source: http://www.zeiss.com
The Carl Zeiss registration and overlay metrology system for photomasks PROVE™ successfully passed the Final Acceptance of NuFlare Technology, the world leading supplier of e-beam based mask writers for cutting edge lithography masks.

JENA/Germany, YOKOHAMA/Japan , 10.03.2011.

PROVE™ enables NuFlare to calibrate and qualify their e-beam mask writers at a technologically advanced level. The calibration via a registration system is a critical step in the manufacturing of e-beam writers and essential for their performance. “The Carl Zeiss system is state-of-the-art and has the resolution capabilities we require. The high accuracy and unprecedented measurement possibilities of PROVE are crucial for development and optimization of our latest generation e-beam mask writers. Having this new system in operation we will be able to extend our lead towards the competitors” states Mr. Fumiaki Shigemitsu, Director of NuFlare Technology.

The Final Acceptance attests Carl Zeiss that PROVE™ is suitable for production and confirms the technology and market success of this newly developed product line. “This initial Final Acceptance at a customer site is an important milestone and further demonstrates the maturity of PROVE™. Its leading edge pattern placement metrology capabilities will enable our customers to realize their current and future metrology needs. A further series of PROVE installations and deliveries is currently proceeding.” explains Dr. Oliver Kienzle, Managing Director of Carl Zeiss Semiconductor Metrology Systems Division.

PROVE™ is designed to measure image placement and critical dimension on photomasks with sub-nanometer repeatability and accuracy. Through its superior 193nm optics the system offers higher resolution that will enable the EUV mask roadmap. It was collaboratively developed within three years by the Semiconductor Metrology Systems Division in Jena/Germany, and the Lithography Optics Division in Oberkochen/Germany, it gets manufactured in Jena.

PROVE™ Final Acceptance

Dr. Oliver Kienzle, Managing Director of Carl Zeiss Semiconductor Metrology Systems Division with Mr. Fumiaki Shigemitsu, Director for Mask Writer Business End of NuFlare Technology, Inc.

600450 Carl Zeiss System PROVE™ passed Final Acceptance at NuFlare Technology glassonweb.com

See more news about:

Others also read

DALLAS, Texas, December 22, 2011 /PRNewswire/ --ReportsnReports adds new market research report 'Solar Photovoltaic (PV) Power - Global Market Size, Installation Prices, Module Market Shares, Market Segmentation, Regulations and Key Country Analysis to 2020' to its store.
Proprietary laminate windows collect, store energy; convert it to electricityRIVIERA BEACH, FL – An innovative new patented technology transforms office building windows into "solar farms" and allows these structures to reuse collected energy and become self-sufficient in the event of a power outage.
The University of Minnesota's historic Folwell Hall completed three years of extensive renovation, just time for the 2011 academic year.
COLUMBUS, Ohio – Dec. 19, 2011 – Safelite AutoGlass®, the nation’s largest provider of vehicle glass repair and replacement services with a fleet of 6,000, announced it will transition to Ford®.
The renewal process for AAMA Corporate Members is now open. AAMA Corporate Membership is available to businesses involved in the manufacture, sale or service of fenestration products and is renewed on an annual basis.
Today designers and architects are looking to the hotel bathroom as the new frontier of the guestroom, turning what has long been a mostly functional space into a haven and means of escape.

Add new comment