Bekaert Introduces New And Improved Rotatable Magnetron End Blocks

Date: 25 April 2005
Source: Bekaert
Bekaert has further established itself as the leader in rotatable magnetron technology by introducing a new generation of ACV3 end blocks that integrate two advanced techniques to respond to the requirements and challenges of high power AC sputtering and the needs for improved robustness under a wide variety of operating conditions.• An improved current transfer technique which has been incorporated into the end block in the form of a drum type slip ring to maximize the possible current density while minimizing brush wear.

This concept allows extended service intervals while reaching mid frequent AC currents up to 400 A (180 kW, both AC and DC).

• An advanced water sealing technique which has been incorporated into the end block by replacing the lip seal with a mechanical seal. This mechanical seal is not sensitive to small particles in water or to sudden pressure shocks; it is self lubricating and wear resistant.

The ACV3 end blocks are the most recent additions to Bekaert’s line of proven, wellestablished industry-leading solutions. These new features complement the double dynamic seal for both water-atmosphere and atmosphere-vacuum with intermediate leak checking capabilities that have always been important features for avoiding catastrophic failures and proactively detecting seal break-down without the need for interrupting a running coating campaign. In addition, the new features further enhance Bekaert’s market leading end blocks which include a separately moving inner assembly within the fixed end block housing to compensate for possible nonaxial movements of imperfect target tubes.

The Bekaert cylindrical magnetron with Bekaert ACV3 end blocks offer the ultimate solution for maximum sputter efficiency in terms of sputter target utilization and sputter yield. Therefore the ACV3 end block is from now onwards offered as a standard component on Bekaert’s cylindrical magnetrons. All existing Bekaert end blocks can be upgraded to ACV3 version end blocks.

600450 Bekaert Introduces New And Improved Rotatable Magnetron End Blocks

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