The coating has more stable phydrophilic and photocatalytic properties and much more transparency than titania coating.In recent years, self-cleaning properties of titanium dioxide thin films have attracted the attention of many industrialists active in the field of building construction and optical devices.This specification is considered to be the result of combination of superhydrophilicity and photocatalytic properties of the thin film. In this study, a three-layer coating of SiO2 / TiO2 / SiO2 was deposited on glass substrate through vapor physical deposition method by using electron beam (EB-PVD). Next, hydrophilicity, photocatalytic and self-cleaning properties of the produced layer were compared to those of SiO2/TiO2 film.
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